Effect of GeCl4/SiCl4 flow ratio on germanium incorporation in MCVD process

Yazar: Mat Sharif, Khairul Anuar, Zulkifli, Mohd Imran, Muhamad Yassin, Shahrin Zen, Tamchek, Nizam, Aljamimi, Salah Mohammed, Yusoff, A., Mohd Amin, Yusoff, S. A., Siti Shafiqah, Abdul Rashid, Hairul Azhar
Baskı/Yayın Bilgisi 2013