TY  - BOOK
T1  - Materials science of thin films : deposition and structure
A1  - Ohring, Milton, 1936- .
LA  - English
PP  - San Diego
PB  - Academic Press
YR  - 2002
ED  - 2nd ed.
UL  - http://discoverylib.upm.edu.my/discovery/Record/171062
OP  - 794
CN  - TA418.9 O38 2002
SN  - 0125249756
KW  - Thin films.
ER  -