TY  - BOOK
T1  - Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control
A1  - Mattox, D. M.
LA  - English
PP  - Westwood, N.J.
PB  - Noyes Publications
YR  - 1998
UL  - http://discoverylib.upm.edu.my/discovery/Record/255114
OP  - 917
CN  - TS695 M444
SN  - 0815514220 (hbk)
SN  - 9780815514220 (hbk)
KW  - Physical vapor deposition : Handbooks, manuals, etc.
ER  -