APA Citation

Konuma, M. (1992). Film deposition by plasma techniques. Berlin: Springer-Verlag.

Chicago Style Citation

Konuma, Mitsuharu. Film Deposition By Plasma Techniques. Berlin: Springer-Verlag, 1992.

MLA Citation

Konuma, Mitsuharu. Film Deposition By Plasma Techniques. Berlin: Springer-Verlag, 1992.

Warning: These citations may not always be 100% accurate.