Film deposition by plasma techniques /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer-Verlag,
1992.
|
| Series: | Springer series on atoms + plasmas ;
V.10. |
| Subjects: | |
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| LEADER | 01124pam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000187400 | ||
| 003 | UPM | ||
| 005 | 20161023085209.0 | ||
| 008 | 940926s1992 gw a b 00110 eng | ||
| 010 | |a 91-37381 | ||
| 020 | |a 3540540571 (Berlin - hardback) | ||
| 035 | |a LC91037381 | ||
| 039 | 9 | |a 200804171325 |b VLOAD |y 200110271216 |z load0004 | |
| 040 | |c UPM | ||
| 090 | 0 | 0 | |a TK7871.15 F5K82 |
| 100 | 1 | |a Konuma, Mitsuharu, |d 1950- . | |
| 245 | 1 | 0 | |a Film deposition by plasma techniques / |c Mitsuharu Konuma. |
| 260 | |a Berlin : |b Springer-Verlag, |c 1992. | ||
| 300 | |a 224p. : |b ill. ; |c 24cm. | ||
| 490 | 0 | |a Springer series on atoms + plasmas ; |v V.10. | |
| 500 | |a Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref. | ||
| 504 | |a Bibliography : p. 195-215. | ||
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition. | |
| 700 | 1 | |a Konuma, Mitsuharu, |d 1950- . |t Purazuma to seimaku no kiso. | |
| 942 | |2 lcc |c 10000 | ||
| 999 | |c 417295 |d 417295 | ||
| 952 | |0 0 |1 0 |4 0 |6 TK787115 F5 K82 |7 0 |9 550889 |a 10000 |b 10000 |c 10000 |d 2016-10-23 |o TK7871.15 F5K82 |p 1000333844 |r 2016-10-23 |t 1 |w 2016-10-23 |y 10000 | ||