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Film deposition by plasma techniques /

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書目詳細資料
主要作者:	Konuma, Mitsuharu, 1950- .
格式:	圖書
語言:	English
出版:	Berlin : Springer-Verlag, 1992.
叢編:	Springer series on atoms + plasmas ; V.10.
主題:	Thin films. Plasma-enhanced chemical vapor deposition.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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