Holdings: Deposition and growth :

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Bibliographic Details
Corporate Authors:	Topical Conference on Deposition and Growth. Limits for Microelectronics (, American Institute of Physics., American Vacuum Society National Symposium (
Other Authors:	Rubloff, G. W.
Format:	Book
Language:	English
Published:	New York : American Institute of physics, 1988.
Series:	Conference proceedings (American Institute of Physics) ; no.167.
Subjects:	Thin films > Congresses. Microelectronics > Materials > Congresses.
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