TY  - BOOK
T1  - Deposition and growth : limits for microelectronics, Anaheim, CA, 1987
T2  - Conference proceedings (American Institute of Physics) ;
A2  - Rubloff, G. W.
LA  - English
PP  - New York
PB  - American Institute of physics
YR  - 1988
UL  - http://discoverylib.upm.edu.my/discovery/Record/511790
OP  - 388
NO  - A Topical Conference on Deposition and Growth : Limits for Microelectronics was held at the Anaheim, California on Nov. 3-5, 1987 in conjunction with the American Vacuum Society's 34th National Symposium.
CN  - TK7871.15 F5T674 1987
SN  - 0883183676
KW  - Thin films : Congresses.
KW  - Microelectronics : Materials : Congresses.
ER  -