Electroceramic-Based MEMS Fabrication-Technology and Applications /
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2005.
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| Edition: | 1st ed. 2005. |
| Series: | Electronic Materials: Science & Technology,
9 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/b101200 |
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