Advanced Mechatronics and MEMS Devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
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| 団体著者: | |
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| その他の著者: | |
| フォーマット: | 電子媒体 eBook |
| 言語: | English |
| 出版事項: |
New York, NY :
Springer New York : Imprint: Springer,
2013.
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| 版: | 1st ed. 2013. |
| シリーズ: | Microsystems,
23 |
| 主題: | |
| オンライン･アクセス: | https://doi.org/10.1007/978-1-4419-9985-6 |
| タグ: |
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目次:
- Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor
- Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms
- Autocalibration of MEMS Accelerometers
- Miniaturization of Micromanipulation Tools
- Digital Microrobotics Using MEMS Technology
- Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches
- Micro-Tactile Sensors for Measurement of In-Vivo Young’s Modulus and Shear Modulus of Elasticity
- Devices and techniques for micro-gripping
- A Wall-climbing Robot with Biomimetic Adhesive Pedrail
- Development of Bio-inspired Artificial Sensory Cilia
- Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design
- Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System. .