Advanced Mechatronics and MEMS Devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
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| Format: | Electronic eBook |
| Language: | English |
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New York, NY :
Springer New York : Imprint: Springer,
2013.
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| Edition: | 1st ed. 2013. |
| Series: | Microsystems,
23 |
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| Online Access: | https://doi.org/10.1007/978-1-4419-9985-6 |
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