Advanced Mechatronics and MEMS Devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
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| 企业作者: | |
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| 其他作者: | |
| 格式: | 电子 电子书 |
| 语言: | English |
| 出版: |
New York, NY :
Springer New York : Imprint: Springer,
2013.
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| 版: | 1st ed. 2013. |
| 丛编: | Microsystems,
23 |
| 主题: | |
| 在线阅读: | https://doi.org/10.1007/978-1-4419-9985-6 |
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