TY  - GEN
TY  - GEN
T1  - Micro and Nano Fabrication Tools and Processes
A1  - Gatzen, Hans H.
A2  - Saile, Volker.
A2  - Leuthold, Jürg.
LA  - English
PP  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg : Imprint: Springer
YR  - 2015
ED  - 1st ed. 2015.
UL  - http://discoverylib.upm.edu.my/discovery/Record/978-3-662-44395-8
AB  - For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
OP  - 519
CN  - T174.7
SN  - 9783662443958
KW  - Nanotechnology.
KW  - Manufactures.
KW  - Nanotechnology and Microengineering.
KW  - Manufacturing, Machines, Tools, Processes.
ER  -