Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions
This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology...
Gorde:
| Egile Nagusiak: | , , , , , , , , , |
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| Formatua: | Artikulua |
| Argitaratua: |
Elsevier
2022
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| Etiketak: |
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