Reactive ion etching of 4H-SiC using SF6/O2 for MEMS application

by Hezarjaribi, Yadollah, Hamidon, Mohd Nizar
Published 2013

Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors

by Hezarjaribi, Yadollah, Hamidon, Mohd Nizar
Published 2013

Pressure sensors based on MEMS, operating in harsh environments (touch-mode)

by Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Bahadorimehr, Alireza
Published 2008

Nonlinear modeling of a capacitive MEMS accelerometer using neural network

by Bahadorimehr, Alireza, Hamidon, Mohd Nizar, Hezarjaribi, Yadollah
Published 2008

A novel neural network model of capacitive MEMS accelerometers

by Bahadorimehr, Alireza, Hamidon, Mohd Nizar, Hezarjaribi, Yadollah
Published 2008

Capacitive pressure sensors based on MEMS, operating in harsh environments

by Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Keshmiri, Sayyed Hossein, Bahadorimehr, Alireza
Published 2008

Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors

by Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Mohd Sidek, Roslina, Hossein, Keshmiri, Raja Abdullah, Raja Syamsul Azmir, Bahadorimehr, Alireza
Published 2011