Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

by Mohammadpour, Ehsan, Yun, Willey Hsien Liew, Mondinos, Nicholas, Altarawneh, Mohammednoor, Lee, Sunghwan, Radevski, Nik, Minakshi, Manickam, Amri, Amun, Lim, Hong Ngee, Jiang, Zhong Tao
Published 2022