Fabrication of p-type Double gate and Single gate Junctionless silicon nanowire transistor by Atomic force microscopy nanolithography

by Dehzangi, Arash, Larki, Farhad, Hassan, Jumiah, Hutagalung, Sabar D., Saion, Elias, Hamidon, Mohd Nizar, Abdullah, A. Makarimi, Kharazmi, Alireza, Mohammadi, Sanaz, Majlis, Burhanoddin Y.
Published 2013