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Zhang, Yafei.
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Zhang, Yafei.
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Multilayer Integrated Film Bulk Acoustic Resonators
by
Zhang
,
Yafei
.
,
Zhang
,
Yafei
.
,
Chen, Da.
Published 2013
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Materials—Surfaces
Nanotechnology
Nanotechnology and Microengineering
Solid State Physics
Solid state physics
Surfaces and Interfaces, Thin Films
Thin films
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