Holdings: Handbook of chemicals and gases for the semiconductor industry /

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Bibliographic Details
Main Author:	Misra, Ashutosh, 1970-
Other Authors:	Hogan, Jeremiah D., Chorush, Russell.
Format:	Book
Language:	English
Published:	New York, NY : John Wiley & Sons, 2002.
Subjects:	Chemicals > handbook, manuals. Semiconductors > materials > handbooks, manuals.
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