Nanoscale Assembly Chemical Techniques /
Recent advances have pushed the limits of lithography firmly into the sub-100 nm domain, with smallest feature sizes around 10 nm. However, compared to living organisms, devices fabricated using nanolithography are not nearly as complex, as they are essentially 2D and contain only a limited number o...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2005.
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| Edition: | 1st ed. 2005. |
| Series: | Nanostructure Science and Technology,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/b106927 |
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