Evolution of Thin Film Morphology Modeling and Simulations /

Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the mor...

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Bibliographic Details
Main Authors: Pelliccione, Matthew. (Author, http://id.loc.gov/vocabulary/relators/aut), Lu, Toh-Ming. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: New York, NY : Springer New York : Imprint: Springer, 2008.
Edition:1st ed. 2008.
Series:Springer Series in Materials Science, 108
Subjects:
Online Access:https://doi.org/10.1007/978-0-387-75109-2
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