Micromechanical Photonics
The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their f...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2006.
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| Edition: | 1st ed. 2006. |
| Series: | Microtechnology and MEMS,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-540-31372-4 |
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