Precursor Chemistry of Advanced Materials CVD, ALD and Nanoparticles /
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new ro...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2005.
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| Edition: | 1st ed. 2005. |
| Series: | Topics in Organometallic Chemistry,
9 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/b75019 |
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