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Reactive Sputter Deposition

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, ar...

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Korporativní autor: SpringerLink (Online service)
Další autoři: Depla, Diederik. (Editor, http://id.loc.gov/vocabulary/relators/edt), Mahieu, Stijn. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Médium: Elektronický zdroj E-kniha
Jazyk:English
Vydáno: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2008.
Vydání:1st ed. 2008.
Edice:Springer Series in Materials Science, 109
Témata:
Materials—Surfaces.
Thin films.
Condensed matter.
Physical chemistry.
Chemical engineering.
Surfaces and Interfaces, Thin Films.
Condensed Matter Physics.
Physical Chemistry.
Industrial Chemistry/Chemical Engineering.
On-line přístup:https://doi.org/10.1007/978-3-540-76664-3
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https://doi.org/10.1007/978-3-540-76664-3

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