Gatzen, H. H., Saile, V., & Leuthold, J. (2015). Micro and Nano Fabrication: Tools and Processes (1st ed. 2015.). Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer.
Chicago Style CitationGatzen, Hans H., Volker Saile, and Jürg Leuthold. Micro and Nano Fabrication: Tools and Processes. 1st ed. 2015. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2015.
MLA CitationGatzen, Hans H., Volker Saile, and Jürg Leuthold. Micro and Nano Fabrication: Tools and Processes. 1st ed. 2015. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2015.
Warning: These citations may not always be 100% accurate.