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Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Detalhes bibliográficos
Main Authors: Gatzen, Hans H. (Author, http://id.loc.gov/vocabulary/relators/aut), Saile, Volker. (http://id.loc.gov/vocabulary/relators/aut), Leuthold, Jürg. (http://id.loc.gov/vocabulary/relators/aut)
Autor Corporativo: SpringerLink (Online service)
Formato: Recurso Electrónico livro electrónico
Idioma:English
Publicado em: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edição:1st ed. 2015.
Assuntos:
Nanotechnology.
Manufactures.
Nanotechnology and Microengineering.
Manufacturing, Machines, Tools, Processes.
Acesso em linha:https://doi.org/10.1007/978-3-662-44395-8
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https://doi.org/10.1007/978-3-662-44395-8

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