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Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Bibliographic Details
Main Authors: Gatzen, Hans H. (Author, http://id.loc.gov/vocabulary/relators/aut), Saile, Volker. (http://id.loc.gov/vocabulary/relators/aut), Leuthold, Jürg. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edition:1st ed. 2015.
Subjects:
Nanotechnology.
Manufactures.
Nanotechnology and Microengineering.
Manufacturing, Machines, Tools, Processes.
Online Access:https://doi.org/10.1007/978-3-662-44395-8
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Table of Contents:
  • Introduction-MEMS, a Historical Perspective
  • Vacuum Technology
  • Deposition Technologies
  • Etching Technologies
  • Doping and Surface Modification
  • Lithography
  • LIGA
  • Nanofabrication by Self-Assembly
  • Enabling Technologies I - Wafer Planarization and Bonding
  • Enabling Technologies II - Contamination Control
  • Device Fabrication - An Example.

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