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Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Bibliographic Details
Main Authors: Gatzen, Hans H. (Author, http://id.loc.gov/vocabulary/relators/aut), Saile, Volker. (http://id.loc.gov/vocabulary/relators/aut), Leuthold, Jürg. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edition:1st ed. 2015.
Subjects:
Nanotechnology.
Manufactures.
Nanotechnology and Microengineering.
Manufacturing, Machines, Tools, Processes.
Online Access:https://doi.org/10.1007/978-3-662-44395-8
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Summary:For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Physical Description:XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
ISBN:9783662443958

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