Introduction to Microsystem Design
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not req...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2015.
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| Edition: | 2nd ed. 2015. |
| Series: | RWTHedition,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-662-47023-7 |
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