Cover Image

Nanofabrication Techniques and Principles /

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...

Full description

Saved in:
Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Stepanova, Maria. (Editor, http://id.loc.gov/vocabulary/relators/edt), Dew, Steven. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Format: Electronic eBook
Language:English
Published: Vienna : Springer Vienna : Imprint: Springer, 2012.
Edition:1st ed. 2012.
Subjects:
Nanotechnology.
Nanochemistry.
Lasers.
Photonics.
Nanotechnology and Microengineering.
Optics, Lasers, Photonics, Optical Devices.
Online Access:https://doi.org/10.1007/978-3-7091-0424-8
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://doi.org/10.1007/978-3-7091-0424-8

Similar Items