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Parallel scanning near-field photolithography: the Snomipede

The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field ph...

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Bibliographic Details
Main Authors: Ul-Haq, Ehtsham, Liu, Zhuming, Zhang, Yuan, Alang Ahmad, Shahrul Ainliah, Wong, Lu Shin, Armes, Steven P., Hobbs, Jamie K., Leggett, Graham J., Micklefield, Jason, Roberts, Clive J., Weaver, John M. R.
Format: Article
Language:English
Published: American Chemical Society 2010
Online Access:http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf
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