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Parallel scanning near-field photolithography: the Snomipede

The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field ph...

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書目詳細資料
Main Authors:	Ul-Haq, Ehtsham, Liu, Zhuming, Zhang, Yuan, Alang Ahmad, Shahrul Ainliah, Wong, Lu Shin, Armes, Steven P., Hobbs, Jamie K., Leggett, Graham J., Micklefield, Jason, Roberts, Clive J., Weaver, John M. R.
格式:	Article
語言:	English
出版:	American Chemical Society 2010
在線閱讀:	http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf
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