Fast simulation of electro-thermal MEMS : efficient dynamic compact models /
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
2007.
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| Series: | Microtechnology and MEMS,
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| Subjects: | |
| Online Access: | Table of contents only |
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