Comments: Fast simulation of electro-thermal MEMS :

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Bibliographic Details
Main Author:	Bechtold, T.
Other Authors:	Korvink, J. G., Rudnyi, E. B.
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, 2007.
Series:	Microtechnology and MEMS,
Subjects:	Microelectromechanical systems > Mathematical models.
Online Access:	Table of contents only
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