Fast simulation of electro-thermal MEMS : efficient dynamic compact models /
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| 主要作者: | Bechtold, T. |
|---|---|
| 其他作者: | Korvink, J. G., Rudnyi, E. B. |
| 格式: | 图书 |
| 语言: | English |
| 出版: |
Berlin ; New York :
Springer,
2007.
|
| 丛编: | Microtechnology and MEMS,
|
| 主题: | |
| 在线阅读: | Table of contents only |
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