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MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Ghodssi, Reza. (Editor, http://id.loc.gov/vocabulary/relators/edt), Lin, Pinyen. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Format: Electronic eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2011.
Edition:1st ed. 2011.
Series:MEMS Reference Shelf, 1
Subjects:
Electronics.
Microelectronics.
Materials science.
Electronic circuits.
Materials—Surfaces.
Thin films.
Electronics and Microelectronics, Instrumentation.
Materials Science, general.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
Online Access:https://doi.org/10.1007/978-0-387-47318-5
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https://doi.org/10.1007/978-0-387-47318-5

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