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Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...

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Bibliographic Details
Main Authors: Laurila, Tomi. (Author, http://id.loc.gov/vocabulary/relators/aut), Vuorinen, Vesa. (http://id.loc.gov/vocabulary/relators/aut), Paulasto-Kröckel, Mervi. (http://id.loc.gov/vocabulary/relators/aut), Turunen, Markus. (http://id.loc.gov/vocabulary/relators/aut), Mattila, Toni T. (http://id.loc.gov/vocabulary/relators/aut), Kivilahti, Jorma. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: London : Springer London : Imprint: Springer, 2012.
Edition:1st ed. 2012.
Series:Microsystems,
Subjects:
Nanotechnology.
Materials—Surfaces.
Thin films.
Optical materials.
Electronic materials.
Nanotechnology and Microengineering.
Surfaces and Interfaces, Thin Films.
Optical and Electronic Materials.
Online Access:https://doi.org/10.1007/978-1-4471-2470-2
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https://doi.org/10.1007/978-1-4471-2470-2

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