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Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...

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Bibliografiske detaljer
Institution som forfatter: SpringerLink (Online service)
Andre forfattere: Behrisch, Rainer. (Editor, http://id.loc.gov/vocabulary/relators/edt), Eckstein, Wolfgang. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Format: Electronisk eBog
Sprog:English
Udgivet: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2007.
Udgivelse:1st ed. 2007.
Serier:Topics in Applied Physics, 110
Fag:
Materials—Surfaces.
Thin films.
Atoms.
Physics.
Plasma (Ionized gases).
Surfaces and Interfaces, Thin Films.
Atoms and Molecules in Strong Fields, Laser Matter Interaction.
Plasma Physics.
Online adgang:https://doi.org/10.1007/978-3-540-44502-9
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https://doi.org/10.1007/978-3-540-44502-9

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