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Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...

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Korporativní autor: SpringerLink (Online service)
Další autoři: Behrisch, Rainer. (Editor, http://id.loc.gov/vocabulary/relators/edt), Eckstein, Wolfgang. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Médium: Elektronický zdroj E-kniha
Jazyk:English
Vydáno: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2007.
Vydání:1st ed. 2007.
Edice:Topics in Applied Physics, 110
Témata:
Materials—Surfaces.
Thin films.
Atoms.
Physics.
Plasma (Ionized gases).
Surfaces and Interfaces, Thin Films.
Atoms and Molecules in Strong Fields, Laser Matter Interaction.
Plasma Physics.
On-line přístup:https://doi.org/10.1007/978-3-540-44502-9
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Obsah:
  • and Overview
  • Computer Simulation of the Sputtering Process
  • Sputtering Yields
  • Results of Molecular Dynamics Calculations
  • Energy and Angular Distributions of Sputtered Species
  • Chemical Sputtering
  • Electronic Sputtering with Swift Heavy Ions.

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