Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2011.
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| Edition: | 1st ed. 2011. |
| Series: | RWTHedition,
1 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-642-19489-4 |
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