Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
Сохранить в:
| Главный автор: | |
|---|---|
| Соавтор: | |
| Формат: | Электронный ресурс eКнига |
| Язык: | English |
| Опубликовано: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2011.
|
| Редактирование: | 1st ed. 2011. |
| Серии: | RWTHedition,
1 |
| Предметы: | |
| Online-ссылка: | https://doi.org/10.1007/978-3-642-19489-4 |
| Метки: |
Добавить метку
Нет меток, Требуется 1-ая метка записи!
|
Оглавление:
- Preface
- Notations and symbols
- Introduction
- Scaling Laws
- Elastic deformations
- Thin Films
- Conductor Paths
- Membranes
- Strain gauges on membranes
- Beams
- Vibrations
- Capillaries
- Capacitive forces
- Piezoelectric effect
- Thermal actuators
- Micro optics
- Diffusion
- Micro valves
- Micro pumps
- Micro dosing
- Analogies between physical domains
- Mechanical devices for electronics
- Pressure sensors
- Flow sensors
- Inertial sensors.