Kapak Resmi

Introduction to Microsystem Design

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...

Ful tanımlama

Kaydedildi:
Detaylı Bibliyografya
Yazar: Schomburg, Werner Karl. (Yazar, http://id.loc.gov/vocabulary/relators/aut)
Müşterek Yazar: SpringerLink (Online service)
Materyal Türü: Elektronik Ekitap
Dil:English
Baskı/Yayın Bilgisi: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2011.
Edisyon:1st ed. 2011.
Seri Bilgileri:RWTHedition, 1
Konular:
Nanotechnology.
Optical materials.
Electronic materials.
Physics.
Electronic circuits.
Nanotechnology and Microengineering.
Optical and Electronic Materials.
Applied and Technical Physics.
Circuits and Systems.
Online Erişim:https://doi.org/10.1007/978-3-642-19489-4
Etiketler: Etiketle
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İçindekiler:
  • Preface
  • Notations and symbols
  • Introduction
  • Scaling Laws
  • Elastic deformations
  • Thin Films
  • Conductor Paths
  • Membranes
  • Strain gauges on membranes
  • Beams
  • Vibrations
  • Capillaries
  • Capacitive forces
  • Piezoelectric effect
  • Thermal actuators
  • Micro optics
  • Diffusion
  • Micro valves
  • Micro pumps
  • Micro dosing
  • Analogies between physical domains
  • Mechanical devices for electronics
  • Pressure sensors
  • Flow sensors
  • Inertial sensors.

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