Film deposition by plasma techniques /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer-Verlag,
1992.
|
| Series: | Springer series on atoms + plasmas ;
V.10. |
| Subjects: | |
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| Item Description: | Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref. |
|---|---|
| Physical Description: | 224p. : ill. ; 24cm. |
| Bibliography: | Bibliography : p. 195-215. |
| ISBN: | 3540540571 (Berlin - hardback) |