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Design and Manufacturing of Active Microsystems

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Büttgenbach, Stephanus. (Editor, http://id.loc.gov/vocabulary/relators/edt), Burisch, Arne. (Editor, http://id.loc.gov/vocabulary/relators/edt), Hesselbach, Jürgen. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2011.
Edition:1st ed. 2011.
Series:Microtechnology and MEMS,
Subjects:
Nanotechnology.
Mechatronics.
Manufactures.
Nanotechnology and Microengineering.
Manufacturing, Machines, Tools, Processes.
Online Access:https://doi.org/10.1007/978-3-642-12903-2
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Table of Contents:
  • 1. Introduction
  • 2. Design and Construction
  • 3. Guiding and Measuring in Active Microsystems
  • 4. Manufacturing and Fabrication
  • 5. Microassembly
  • 6.Industrial Applications.

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