Design and Manufacturing of Active Microsystems
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...
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| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2011.
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| Edition: | 1st ed. 2011. |
| Series: | Microtechnology and MEMS,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-642-12903-2 |
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